適用范圍:Applicability | 105~1.3×10-4Pa(軸封為橡膠)105~1.3×10-5Pa(軸封為波紋管) |
閥門漏率:Valve Leak Rate | ≤1.3×10-4Pa.L/S.(軸封為橡膠)≤1.3×10-5Pa.L/S.(軸封為波紋管) |
適用溫度:Applicable Temperature | -25~+80℃(丁腈橡膠) -30~+150℃(氟橡膠) |
氣源壓力:Annoy pressure | 0.4~0.6MPa |
祝富