Small Batch Fast Cycle Sputter Deposition立式快速磁控濺射設(shè)備
MVS Plascoat is significantly thinner and performs three times better in corrosion testing than our competitors.
野馬Plascoat 保護(hù)涂層技術(shù)在腐蝕性測(cè)試中的性能優(yōu)于競爭對(duì)手的3倍
Mustang’s Plascoat is an HMDSO mid frequency plasma cured monomer top coat. 野馬 Plascoat 技術(shù)是采用中頻等離子離化HMDSO(六甲基二硅氧烷)制備的單體頂層 |
Electrode design minimizes arcing and simplifies maintenance 電極桿的設(shè)計(jì)可實(shí)現(xiàn)最小化滅弧和的維護(hù) |
Highly uniform coatings on complex three dimension and high aspect ratio substrates. 在復(fù)雜的3維和高深寬比產(chǎn)品上獲得均勻性涂層 |
Used to protect the PVD layer from UV, moisture, and oxidation. 用于保護(hù)PVD 層隔離UV,水氣和防止氧化 |
MVS’s reflector coatings exceeds all forward lighting specifications. 野馬反射鏡涂層技術(shù)滿足所有前大燈規(guī)格要求 |
MVS Standard Reflective Coating Processes 標(biāo)準(zhǔn)反射涂層工藝
88 – 91% - Standard Al reflector with Plascoat protective coating
88 – 91%標(biāo)準(zhǔn)的鋁反射鏡包含Plascoat保護(hù)涂層
Colt 4828 System – Typical Configuration for Lighting 車燈鍍膜典型配置:
Dual door – Stainless Steel Vertical chamber with viewport and single planetary turn table in each door. 雙門,不銹鋼腔室,每一個(gè)門含一個(gè)單軸工件架 |
(2) Mustang Vacuum High Power Planar Magnetron Cathodes ,up to 90kw DC power per cathode 2個(gè)野馬高功率磁控濺射陰極,每一個(gè)陰極90KW |
Oerlikon SV630 mechanical pump & Oerlikon WH4400 blower 萊寶SV630 機(jī)械泵和WH4400 羅茨泵組 |
Varian 20inch high vacuum diffusion pump with cryocoil Polycold cryogenic cooler for water vapor pumping 瓦里安20英寸擴(kuò)撒泵 + Polycold水汽捕集泵 |
One 10K Medium Frequency 40 KHz Power Supply and one load matching network with two 1” glow bars 1個(gè)10KW 的中頻電源和匹配的2個(gè)直徑1英寸的電極棒 |
Standard Automotive Reflector Cycle 標(biāo)準(zhǔn)車燈反射膜鍍膜周期 | 3.5 – 5 Minutes substrate dependent 3.5-5分鐘根據(jù)基底不同 |
Optimized Coating Area 有效涂層空間 | 1,219mm 高x 711mm 直徑 Single or multiple planetary tooling configurations單軸或多軸工件架配置 |
MVS High Power Cathode 高功率濺射陰極 | 1,371mm x 152mm target 靶材尺寸 Typically 2 cathodes 典型的2個(gè)濺射陰極 Upgrade to 4 cathodes 可升級(jí)為4個(gè)濺射陰極 |
Mid Frequency AC Top Coat | 中頻交流Top Coat |
Cryogenic water pumping | 低溫水汽捕集泵 |
Automation Options Available 可選項(xiàng) | 腔室門自動(dòng)進(jìn)樣 |
System Dimensions 設(shè)備尺寸 | Width 寬 3.71 meters (12’ 2”) 米 Depth 深 5.18 meters (17’) 米 Height 高 2.79 meters (9’ 2”) 米 |