法國阿爾卡特真空泵維修保養(yǎng)、ALCATEL ADIXEN A1503H干式真空泵
ALCATEL ADIXEN A3H range Dry pumps Applications
? All Semiconductor harsh applications such as:
- PECVD
- ALD
- MOCVD
- SACVD
- LPCVD
ALCATEL ADIXEN A3H range Dry pumps Technical Specifications:
ALCATEL ADIXEN A3H range pumping speed - 60 Hz / No purge