法國(guó)ALCATEL A803H干式真空泵維修保養(yǎng)
ALCATEL ADIXEN A3H range Dry pumps Applications
? All Semiconductor harsh applications such as:
- PECVD
- ALD
- MOCVD
- SACVD
- LPCVD
ALCATEL ADIXEN A3H range Dry pumps Technical Specifications:
ALCATEL ADIXEN A3H range pumping speed - 60 Hz / No purge
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