JDS-1立式接觸式干涉儀
本儀器是一種采用量塊或標(biāo)準(zhǔn)零件借以高精度的比較方式的立式精密長度計量儀器。主要用于150mm以下塊規(guī),亦可用作高精密度的長度和外徑的精密測量,是各級計量室的基本長度計量儀器之一。
JDS-1 Interferometer is applicable for measurement of 3-4 grade gauge blocks or precision sizes up to 150 mm by high-precision comparison with a higher grade of gauge block or a standard reference component. It is one of the basic length-metrological instruments.
and cylinders.
JDS-1立式接觸式干涉儀技術(shù)參數(shù):
被測件長度 Max. measured length | 150 mm |
工作臺行程 Lifting range of worktable
| 5 mm |
測桿移動范圍 | 0.5mm |
分劃板刻度范圍 | ±50格 |
直接測量范圍 Measuring range | 5-20μm |
分度值調(diào)整范圍 Adjusting range of grad | 0.05-0.2 μm
|
推薦使用分度值Recommended grad | 0.1 μm
|
測量壓力 Measuring force | (1.5±0.1) N |
儀器示值穩(wěn)定性 Indication reliability | 0.02 μm
|
儀器誤差 Indication error
| 數(shù)字顯示 Digital display |
測量誤差 Max.measurement error | | | | | n 是格數(shù), i是格值,λ是濾光片中心波長,△λ是濾光片波長誤差 n is number of divisions, i is division value △λ is error of wavelength | | |
儀器體積 Dimensions
| 280×500×700 mm |
儀器重量 Weight
| 40 kg |
標(biāo)準(zhǔn)配件 Standard attachments | | | 五筋園臺Five-Rib circular stage 九筋瑪瑙臺Agate stage 可調(diào)園平臺Adjustable planar stage 輔助臺Auxiliary stage, fixed 平面測帽Planar contact tip, Ф2 小球面測帽Small spherical contact tip 干涉濾光片 Wavelength filter | | | |
JDS-1立式接觸式干涉儀工作原理:
利用光學(xué)杠桿的放大原理,將微小的位移量轉(zhuǎn)換為光學(xué)影象的移動。其工作原理如左圖所示。