STK-7200R_SINTAIKE全自動晶圓切割貼膜機（滾輪）特點： |
全自動晶圓/框架裝卸 |
日本進口晶圓搬運機械手臂，晶圓對位系統(tǒng) |
全自動晶圓貼膜 |
標置ESD特氟龍電鍍接觸晶片夾盤 |
應(yīng)對DBG工藝：貼膜后再撕BG膜 |
貼膜動作：自動拉膜和貼膜 |
晶圓臺盤：通用(一體式)特氟龍防靜電涂層接觸式臺盤；或硅膠臺盤，或陶瓷臺盤 |
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STK-7200R Fully Automatic Wafer Roller Mounter Specifications： |
Wafer Size | Diameter: 6” 、8 |
Wafer Thickness | 150 ~ 725 um |
Wafer material | Si, SiC |
Wafer Type | Single Flat, Double Flat or V-Notch |
Tape Type | Blue Tape or UV Tape Width :230、300 mm, Length:100 m; Thickness: 0.05 ~ 0.2 mm |
Frame Type | 6” DISCO or K&S, 8” DISCO or K&S; or Customer Specified |
Mounting Theory | Roller Mounting |
Wafer Place Accuracy | X-Y: +/- 0. 1 mm Θ: +/- 0.1° |
Input & Output | Dual Input Wafer Cassette / Single Output Frame Cassette |
ESD Control | ESD Roller / ESD Wafer Chuck / ESD Ion Blower |
Wafer Transfer | Horizontal Multi Axis Robot with Vacuum or Bernoulli Endeffector Wafer Position & Warpage Intelligent Mapping in Cassette |
Wafer Alignment | Fiber Sensor for Wafer Alignment |
Control Unit | Standard Industrial PC with 17” Touch Panel LCD / Windows O/S |
Power Supplier | Single Phase AC 220 V, 25A |
Air Supplier | 5.0 Kgf/cm2 CDA, 150 L/min |
Machine Construction | Made of Full Aluminium Profile |
Dimensions | 1750 mm (W) × 1350 mm (D) × 1800 mm (H) |
Net Weight | 870 Kg |
