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微機(jī)械激光掃描鏡

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公司名稱北京錦坤科技有限公司
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更新時(shí)間2024/11/11 13:18:34
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射頻光纖傳輸模塊,微波光纖傳輸模塊,微波光纖延遲線,微波光端機(jī)，射頻光端機(jī)，

產(chǎn)品簡(jiǎn)介在線詢價(jià)

此系列的微機(jī)械激光掃描鏡分為1D和2D產(chǎn)品，即根據(jù)其其掃描軸為單軸或雙軸而不同。此類微光機(jī)電光束掃描鏡也被稱為微掃描鏡或者微光機(jī)電光束偏轉(zhuǎn)器。

微機(jī)械激光掃描鏡產(chǎn)品信息

此系列的微機(jī)械激光掃描鏡分為1D和2D產(chǎn)品，即根據(jù)其其掃描軸為單軸或雙軸而不同。此類微光機(jī)電光束掃描鏡也被稱為微掃描鏡或者微光機(jī)電光束偏轉(zhuǎn)器。
The mirror plate of the microscanner performs a continuous, harmonic oscillation. The oscillation is excited electrostatically and utilizes planar electrostatic comb drives. The oscillation-frequency has to be close to the natural frequency of the scanning axis. Adjusting the driving voltage or the driving frequency allows setting and controlling the
oscillation amplitude. For 2D devices, the mirror plate is gimbal-mounted. The resonance frequency of each axis is determined by design independently. Each axis is excited individually. Thus, the ratio of the oscillation amplitudes and the phase difference can be set and controlled arbitrarily.

Technical Properties

Mirror Motion	harmonic oscillation
Scan Frequencies	depending on configuration type and design parameters 100 Hz - 50 kHz
Drive Signal	A square wave voltage input signal is required which can be generated with standard laboratory equipment - a power supply unit is not in standard scope of delivery with VarioS®-microscanner-demonstrators. 1D- VarioS®-microscanner-demonstrators can be delivered with the Laser Deflection Cube as an option. Alternatively customer specific drive electronics and system designs can be delivered as result of a research and development project from Fraunhofer IPMS.
Amplitude	up to ±29° maximum mechanical deflection, amplitude controllable via electrode voltage and input pulse frequency
Drive Mode	electrostatic-resonant
Drive	planar comb electrodes with out-of plane motion
2D Axis Configuration	gimballed
Position Sensors	no position sensor integrated
Mirror Shape	circular
Mirror Diameter / 1D-Microscanner	0.5 - 3 mm
Mirror Diameter / 2D-Microscanner	0.5 - 2 mm
Mirror Reflectance	dependent on wavelength of light source, approx. 80-92% (see Fig. 1)for visible range
Chip Dimensions	5370 µm x 4540 µm