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1700°C九通道混氣高真空CVD系統(tǒng)

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型號：GSL-1700X-HVC9產(chǎn)品概述：GSL-1700X-HVC9isCEcertified80mmdiameteraluminatubefurnacewithvacuumpumpsystem(upto10-5torr)and9channelprecisiondigitalMassflow-meters

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型號：GSL-1700X-HVC9

產(chǎn)品概述：GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.

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技術(shù)參數(shù)實(shí)驗(yàn)案例警示/應(yīng)用提示配件詳情

Furnace Structure	· Double layer steel casing with air cooling. · Two cooling fans inside to keep case temperature < 55^oC. · 內(nèi)爐膛表面涂有美國進(jìn)口的高溫氧化鋁涂層可以提高設(shè)備的加熱效率，同時也可以延長爐膛的使用壽命 · High purity Alumina refractory chamber · · Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel. · Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
Power	6 Kw
Voltage	AC 208-240V Single Phase, 50/60 Hz
Heating Element	8?pcs1800^oC grade MoSi₂ heating element
Max. Temperature	1650 ^oC (< 2hours )（更新時間：19.12.10--JS2）
Continuous Temperature	1600 ^oC
Max. Heating Rate	≤5 ^oC /min
Tube Size and Materials	Premier Grade alumina tube made in USA. （標(biāo)配尺寸） ( 60mm) O.D.x I.D. (54mm) x 1000mm Length · · （選配尺寸） ( 80mm) O.D.x I.D. (74mm) x 1000mm Length · · Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).
Heating Zone	Heating zone length: 457 mm (18") · · Constant Temperature Zone length: 150 mm (6")(+/-1^oC) 注：由于測量手段及外部環(huán)境的影響，測量結(jié)果可能會有偏差，此參數(shù)僅供參考不作為該設(shè)備的技術(shù)指標(biāo)。您購買產(chǎn)品需要準(zhǔn)確的恒溫區(qū)數(shù)據(jù)，請與我公司銷售人員聯(lián)系
Temperature controllers	One precision digital temperature controller programmable with 50 segments. · · PID adjustable with auto tune function to ensure temperature stability within +/- 1 ^oC. · · 控溫儀表操作視頻 · · Full protection in each controller for over-temperature and broken thermal couple.
Thermal Couple	B type thermal couples built in
Vacuum Flanges	· Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve. · Double high temperature silicone O-ring for using under 300^oC. Porous alumina blocks included for protecting flange from heat radiation.
Vacuum pumps	Tow stages vacuum pump installed in bottom case: · OneDouble Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10^-2 torr. · · One turbo molecular pump with max. vacuum pressure of 2x10^-5 torr. One precision vacuum sensor installed. · · Stainless steel hose tube is included for connecting to tube furnace. · · Digital vacuum meter / controller installed.
Vacuum Sensor & display	Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display. · · Vacuum controller and display areinstalled in bottom mobile cart.
Gas flow meter User Manual?(Click to download)	· 9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-99% of full scale) · 3 MFC at range 0 - 1000scc · 3 MFC at range 0 - 200scc · 3 MFC at range 0 - 10 scc · one floating meter will be installed for N2 gas only · one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer. · 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below. Software ａnd interface (optional at extra cost). Please click uderline for software operation instruction
Pipe connection, valves and gas mixer	· SS 316 1/4" pipe/fitting · SS 316 vacuum needle valves · 21 sets of stainless steel vacuum valves are installed outside of right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately. Please click here to see sketch of pipe connection.
Dimension	Furnace: 550 x 380 x 520 Bottom Mobile case: 600x600x597
Net Weight	about 100 kg
Shipping weight	200 Lbs
Shipping package size after crating	Two cases in one plastic pallet: 45x45x35/case
Warranty & certificate	One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) · · CE Certificate